Qulee CGM – Compact Gas Monitor

Features

• Ideal for process monitoring of various sputtering sysytem
• No differential pumping system required (at 1Pa (7.5×10-3Torr / 1×10-2 mbar) lower)
• Integrated Display: No need for PC
• Simple Operation: “One Click” function
• Max 120°C (248°F) high temperature bake (250°C (482°F) when sensors are removed)
• Electron bombard degas
• Ion source and secondary electron multiplier protection maintenance help function
• Traceability of analysis tube (patent pending)
• Various Leak Tests are Available (Helium leak test, air leak test, built-up test)
• Capable of total pressure measurement (ionization gauge)
• Qulee QCS is Included:
• This software is included and compatible with (Windows XP/7)
• QIP (Quick Install Package system) is Included:
• Auto measuring package (refer to options catalog for details)
• Conforms with CE

Applications

• Process monitoring for PV, FPD, and semiconductor system
• Residual gas analysis in PVD system
• Impurities (H2O, etc.) control in PVD system
• For leak testing