RGAs do analysis of gases and their composition, this is needed for:
- Leak detection and identification
- Find and identify contaminants
- Verify gas purity
- Product/process quality assurance
- Process & equipment diagnostics and control
- Optimize process performance and yield
The perfect solution in a wide range of applications:
- Semiconductor processes
- Thin-film and display
- Vacuum heat treatment
- Vacuum freeze drying
- Research & development
- High energy physics
Unique benefits
- Total pressure measurement for full process control
- Dual filament for highest reliability and up-time
- On unit display for basic measurements without a PC
- Customer replaceable parts
- Degas function
- Protection of Ion source and EM
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